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Comprehensive Comparison of Various Techniques for the Analysis of Elemental Distributions in Thin Films: Additional Techniques

机译:薄膜中元素分布的各种技术综合比较:附加技术

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摘要

In a recent publication by Abou-Ras et al., various techniques for the analysis of elemental distribution in thin films were compared, using the example of a 2-µm thick Cu(In,Ga)Se2 thin film applied as an absorber material in a solar cell. The authors of this work found that similar relative Ga distributions perpendicular to the substrate across the Cu(In,Ga)Se2 thin film were determined by 18 different techniques, applied on samples from the same identical deposition run. Their spatial and depth resolutions, their measuring speeds, their availabilities, as well as their detection limits were discussed. The present work adds two further techniques to this comparison: laser-induced breakdown spectroscopy and grazing-incidence X-ray fluorescence analysis
机译:在Abou-Ras等人的最新出版物中,以2 µm厚的Cu(In,Ga)Se2薄膜作为吸收体材料作为示例,比较了分析薄膜中元素分布的各种技术。一个太阳能电池。这项工作的作者发现,通过18种不同的技术确定了垂直于整个Cu(In,Ga)Se2薄膜垂直于基板的相对Ga分布,这些技术应用于来自相同的相同沉积过程的样品。讨论了它们的空间和深度分辨率,它们的测量速度,它们的可用性以及它们的检测极限。本工作为这种比较增加了另外两种技术:激光诱导击穿光谱法和掠入射X射线荧光分析法

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